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M.M. Kluba

10 records found

Authored

The progress in the field of neurostimulation is impressive, both from a technical as well as from a therapeutic point of view. Nowadays, the electrical stimulation of the nervous system can be used to induce or suppress muscle responses. Additionally, it can also influence heari ...

Cavity‐box soi

Advanced silicon substrate with pre‐patterned box for monolithic mems fabrication

Several Silicon on Insulator (SOI) wafer manufacturers are now offering products with customer‐defined cavities etched in the handle wafer, which significantly simplifies the fabrication of MEMS devices such as pressure sensors. This paper presents a novel cavity buried oxide ...

Active implantable medical devices have been developed for diagnosis, monitoring and treatment of large variety of neural disorders. Since the mechanical properties of these devices need to be matched to the tissue, soft materials, such as polymers are often preferred as a substr ...

Accurate alignment between the cavities in cavity-SOI (c-SOI) wafers and lithography on the wafer surface is essential to advanced MEMS production. Existing alignment methods are well defined, but often require specialized equipment or costly software packages available only i ...

Platinum is widely used as the electrode material for implantable devices. Owing to its high biostability and corrosion resistivity, platinum could also be used as the main metallization for tracks in active implants. Towards this goal, in this work we investigate the stability o ...
We present a novel, wafer-based fabrication process that enables integration and assembly of electronic components, such as ASICs and decoupling capacitors, with flexible interconnects. The electronic components are fabricated in, or placed on precisely defined and closely-spaced ...
This paper presents a new method for the CMOS compatible fabrication of microchannels integrated into a silicon substrate. In a single-step DRIE process (Deep Reactive Ion Etching) a network of microchannels with High Aspect Ratio (HAR) up to 10, can be etched in a silicon substr ...

Contributed

The Flex-to-Rigid (F2R) platform is a generic IC-based technology platform that allows flexible sensors and electronics to be fabricated and integrated onto the catheters or guidewires of minimally invasive medical instruments. In this thesis, a process flow was developed for the ...
F2R is a generic IC fabrication based platform that allows for the fabrication of miniature and flexible sensing functionalities for minimally invasive medical instruments. Examples of these minimally invasive medical instruments are catheters and guidewires. By introducing more ...
Cellular stiffness plays an important role for several diseases such as atherosclerosis, malaria and cancer. Cellular stiffness can be derived by the velocity of a cell that is squeezed through a constriction channel. For example, a rigid cell will move slowly through the constri ...