XD

X. Dou

9 records found

Authored

Nanostructures with steep side wall angles (swa) play a pivotal role in various technological applications. Accurate characterization of these nanostructures is crucial for optimizing their performance. In this study, we propose a far-field detection method based on coherent Four ...
In the semiconductor industry, the minimumelement size has stepped into nanometer level. To keep the functionality of fabricated nanostructures, there is a huge demand of a technique that can provide non-destructive inspection and allow for in-line or in-situ monitoring during th ...

Optical singularities indicate zero-intensity points in space where parameters, such as phase, polarization, are undetermined. Vortex beams such as the Laguerre–Gaussian modes are characterized by a phase factor eilθ, and contain a phase singularity in th ...

Accurate determination of the physical parameters of nanostructures from optical far-field scattering is an important and challenging topic in the semiconductor industry. Here, we propose a novel metrology method to determine simultaneously the height and side-wall angle of a ...

The sidewall angle (SWA) of a nanostructure exerts influence on the performance of the nanostructure and plays an important role in processing nano-structural chips. It is still a great challenge to determine steep SWAs from far field measurements especially when the SWAs are ...

Plasmonic tweezers

For nanoscale optical trapping and beyond

Optical tweezers and associated manipulation tools in the far field have had a major impact on scientific and engineering research by offering precise manipulation of small objects. More recently, the possibility of performing manipulation with surface plasmons has opened oppo ...

Improving the image quality of small particles is a classic problem and especially challenging when the distance between particles are below the optical diffraction limit. We propose a imaging system illuminated with radially polarized light combined with a suitable substrate ...

Nonzero transverse spin density, which describes phenomenon in which the electromagnetic fields of localized light spin in a plane containing its wavenumber vector, has gained enormous interest recently because of its useful applications like spin-direction coupling and routin ...

We show that elongating a tightly focused field in the direction perpendicular to the optical axis is possible. We demonstrate our approach by specially shaping the Pancharatnam–Berry (PB) phase. Moreover, the analytical formulae required to calculate the strength vectors and ...