This article presents a low-loss silicon microelectrical mechanical system (MEMS) phase shifter operating in the 500-600 GHz band. The phase shifter consists of a \text{30-}\mu \text{m} thick perforated silicon slab that is moved in and out of a waveguide in the E-plane with a large deflection MEMS actuator. By implementing different hexagonal patterns in the silicon slab, a stepped permittivity is created to impedance match, and thus, reduce return loss. When the silicon slab is inserted into the waveguide, the phase velocity of the incoming wave is decreased, thus resulting in different phase shifts depending on the position of the slab inside the waveguide. The MEMS phase shifter is fully actuated at around 50\,{\text{V}} and can move up to \pm 95\,\mu \text{m}, depending on the applied voltage. The insertion loss, when the maximum phase shift is achieved, is measured to be \text{1.8}\,\text{dB}, compared to a 1.6\text{-}\text{dB} insertion loss for a waveguide of equivalent length. The return loss is better than \text{18}\,\text{dB} for the desired band. The measured phase shift, with the slab fully inserted into the waveguide at \text{550}\,\text{GHz} was 145^\circ. The MEMS phase shifter enables a variety of applications including phased array antenna systems with scanning capability for mapping of planetary surfaces with an electronically steerable antenna.

NASA's Planetary Science Decadal Survey has concluded that isotopic measurements of cometary water vapor are a means to unraveling the mysteries involving the origin of Earth's water and the evolution of our solar system. To support this, a recent Jet Propulsion Laboratory internal research program has developed quantum limited superconductor-insulator-superconductor (SIS) receivers in the important 500-600 GHz submillimeter frequency band. These instruments can be used to detect the deuterated water (HDO) ground state (110-101), H216O ortho ground state (110-101), and the oxygen isotopologues H217O and H218O with exquisite sensitivity. To achieve the presented results, we have investigated aluminum oxide (AlOx) and aluminum nitride (AlNx) barrier SIS tunnel junction mixers on the 6-μm silicon-on-insulator substrate. The AlOx and AlNx junction mixer blocks utilize diagonal and smooth-profile conical horns, respectively. In both cases, a commercial 4-8-GHz intermediate frequency low-noise amplifier (LNA) has been integrated into the mixer block. The AlOx (low-current-density) barrier SIS junctions were fabricated with 2-μm gold beam-lead technology, whereas in the case of the AlNx SIS tunnel junction, we use capacitive RF decoupling tabs. The latter approach simplifies fabrication, increases yield, eases the mounting process, and facilitates scaling to higher frequencies. For an actual flight mission, with operation ≤4.2 K, the allowed heat dissipation of the mixer-integrated LNA needs to be minimized. In this article, we also investigate the receiver sensitivity as a function of the LNA dc power consumption. We find that the dc power consumption of the LNA can be reduced to ∼1.6 mW with minimal loss in sensitivity. It is anticipated that the continued InP HEMT development for quantum computer applications are likely to reduce the required LNA power dissipation even further.