Enhancing the wettability of high aspect-ratio through-silicon vias lined with LPCVD silicon nitride of PE-ALD titanium nitride for void-free bottom-up copper electroplating

Melting and crystallization behavior of low-pressure chemical-vapor-deposition amorphous Si films during excimer-laser annealing

Advanced excimer-laser crystallization techniques of Si thin-film for location control of large grain on glass

A combined TEM and time-resolved optical reflectivity investigation into the excimer-laser crystallization of a-Si films

Heterogeneous nucleation in excimer-laser melted Si thin-films