Gas-phase chemistry in up-scaled plasma enhanced metal-organic chemical-vapor deposition of TiN and Ti(C,N) on tool steel.

Optimisation of the MOCVD of Ti(C,N) in a pulsed H2-N2 plasma by gas-phase analysis

Transamination in pulsed DC-plasma enhanced CVD of Ti(C,N) from TDMAT.

A mass-spectroscopical study of the decomposition of Ti(NMe2)4 in a mixed Ar-H2-N2 pulsed d.c. plasma.