Deposition of Hydrogen-Doped Indium Oxide Thin Films Using Atmospheric-Pressure Plasma-Enhanced Spatial Atomic Layer Deposition

Transparent conductive oxides (TCOs) are wide bandgap semiconductors characterized by high conductivity and high transparency in the visible and near infrared spectrum of light. TCOs find applications in displays, thin film transistors, solar cells, etc., due to these distinctive properties. Hydrogen-doped indium oxide (IO:H), a TCO first...