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document
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Buja, F. (author)
This thesis aims to provide the latest progresses on the experimental investigation of friction and adhesion phenomena, occurring at the nanoscale in microelectromechanical systems (MEMS). I have studied and characterized the interaction between MEMS sidewalls in contact and sliding one onto another. Ultrananocrystalline diamond (UNCD) and...
doctoral thesis 2015
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document
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Kokorian, J. (author), Buja, F. (author), Van Spengen, W.M. (author)
In this paper, we present a new method for detecting in-plane displacements in microelectromechanical systems (MEMS) with an unprecedented sub-ångström accuracy. We use a curve-fitting method that is commonly employed in spectroscopy to find peak positions in a spectrum. We fit a function to the intensity profile of the image of a silicon beam...
journal article 2014
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