A sampling problem from lithography for chip layout

Conference Paper (2007)

Author(s)

EA Cator (TU Delft - Old - EWI Ch. Statistics<2004)

TJ Dijkema (External organisation)

Research Group

Old - EWI Ch. Statistics<2004

Techniek Conf.proc. > 3 pag Wiskunde en Informatica Technische Wiskunde en Informatica

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Publication Year

2007

Research Group

Old - EWI Ch. Statistics<2004

Pages (from-to)

45-53

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