Accurate SIMS doping profiling of aluminum-doped solid-phase epitaxy silicon islands

Journal article (2008)

Authors

Y Civale Old - EWI Sect. ECTM
L.K. Nanver Electronic Components, Technology and Materials - EEMCS
SG Alberici External organisation
A Gammon External organisation
I Kelly External organisation
Research Group
Old - EWI Sect. ECTM
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Published Date

2008

Language

Undefined/Unknown

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Research Group

Old - EWI Sect. ECTM