Accurate SIMS doping profiling of aluminum-doped solid-phase epitaxy silicon islands
Journal Article
(2008)
Authors
Y Civale (Old - EWI Sect. ECTM)
L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)
SG Alberici (External organisation)
A Gammon (External organisation)
Isabel Kelly (External organisation)
Research Group
Old - EWI Sect. ECTM
To reference this document use:
https://resolver.tudelft.nl/1e9187a2-07e4-4fa5-a44f-a61ea6a61f06
More Info
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Publication Year
2008
Research Group
Old - EWI Sect. ECTM
Issue number
4
Volume number
11
Pages (from-to)
H74-H76
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