Ultrashallow defect-free junction formation by excimer laser annealing

Popadic, M; Nanver, L.K.; van der Cingel, J.

Ultrashallow defect-free junction formation by excimer laser annealing

Conference paper (2008)

Authors

M Popadic Electronic Components, Technology and Materials -

L.K. Nanver Electronic Components, Technology and Materials -

J. van der Cingel Old - EWI Sect. ECTM

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2008

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials