Ultrashallow defect-free junction formation by excimer laser annealing
Conference Paper
(2008)
Author(s)
M Popadic (TU Delft - Electronic Components, Technology and Materials)
L.K. Nanver (TU Delft - Electronic Components, Technology and Materials)
J van der Cingel (TU Delft - Old - EWI Sect. ECTM)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:3a823d0e-93cf-40c4-a1bb-4da6a6378ea1
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Publication Year
2008
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
495-498
ISBN (print)
978-90-73461-56-7
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