A Platform for Manufacturable Stretchable Micro-electrode Arrays

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Published Date

09-09-2012

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Source:

Procedia Engineering, 47, 2012

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Abstract

A platform for the batch fabrication of pneumatically actuated Stretchable Micro-Electrode Arrays (SMEAs) by using state-of-the-art micro-fabrication techniques and materials is demonstrated. The proposed fabrication process avoids the problems normally associated with processing of thin film structures on polydimethylsiloxane (PDMS), by first fabricating the electrodes and electrical interconnects on the silicon wafer using fine-pitched stepper lithography, and afterwards transferring the structures to the elastomer. Stretchability is achieved by a novel spiral design for the interconnects. Experiments demonstrate the biocompatibility of the fabricated devices for in vitro cell culturing.