Residue-free plasma etching of polyimide coatings for small pitch vias with improved step coverage

Mimoun, B.A.Z.; Pham, HTM; Henneken, V; Dekker, R.

Residue-free plasma etching of polyimide coatings for small pitch vias with improved step coverage

Journal article (2013)

Authors

B.A.Z. Mimoun Electronic Components, Technology and Materials

HTM Pham Electronic Components, Technology and Materials

V Henneken External organisation

R. Dekker Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2013

Language

English

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Research Group

Electronic Components, Technology and Materials

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