Thin Film Interface Fracture Properties at Scales Relevant to Microelectronics

Conference paper (2007)
Faculty
Mechanical Maritime and Materials Engineering (Mechanical Maritime and Materials Engineering) (TU Delft)
Copyright: © 2007 Xiao, A.; Wang, L.G.; Van Driel, W.D.; Van Der Sluis, O.; Yang, D.G.; Ernst, L.J.; Zhang, G.Q.
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Published Date

2007

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Source:

proceedings of the International Conference on Thermal, Mechanical and Multi-Physics Simulation Experiments in Microelectronics and Micro-Systems, London, April 15-18, 2007

Faculty

Mechanical Maritime and Materials Engineering

Files

2007-35.pdf
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