Thickness evaluation of deposited pureb layers in micro-/millimeter-sized windows to Si
Conference Paper
(2014)
Author(s)
V Mohammadi (TU Delft - Electronic Components, Technology and Materials)
S Ramesh (External organisation)
L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1109/ICMTS.2014.6841492
To reference this document use:
https://resolver.tudelft.nl/uuid:6812f9b8-fa98-415f-b7ee-2013aa9dcff5
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Publication Year
2014
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
194-199
ISBN (print)
978-1-4799-2192-8
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