Development and applications of novel optoelectromechanical system micro-machined in silicon

Vdovin, G; French, Paddy; Huijsing, Johan H; Loktev, M

Development and applications of novel optoelectromechanical system micro-machined in silicon

Report (2000)

Authors

G Vdovin External organisation

Paddy French Electronic Instrumentation

Johan H Huijsing Electronic Instrumentation

M Loktev Electronic Instrumentation

Research Group

Electronic Instrumentation

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Published Date

2000

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Research Group

Electronic Instrumentation

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