Nano Optomechanical Read-out for Microcantilever Sensors

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Abstract

This thesis demonstrates a novel displacement sensor with photonic structure a micro ring resonator with a micro cantilever. This device uses the working principle of micro ring resonator and transfer the mechanical signal into optical signal. The goal of this project is to design, fabricate and measure such a device. Fabrication process is not so complex, but as processing at chip level introduces additional complexity as not all machines can handle small pieces, several problems needed to be settled and most time was spent on fabrication, this is discussed in detail. This new design should have a same sensitivity as the micro ring resonator.