Post-processing micromachined pull-in accelerometer
Conference Paper
(2007)
Author(s)
L.S. Pakula (TU Delft - Electronic Instrumentation)
Paddy French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:9a363848-49f1-4246-9ce4-2eff6a281646
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Publication Year
2007
Research Group
Electronic Instrumentation
Pages (from-to)
1171-1174
ISBN (print)
1-4244-0842-3
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