A self-aligned vertical HBT for thin SOI SiGeC BiCMOS

G Avenier (External organisation)

T Schwartzmann (External organisation)

P Chevalier (External organisation)

B Vandelle (External organisation)

L Rubaldo (External organisation)

D Dutartre (External organisation)

L Boissonnet (External organisation)

F Saguin (External organisation)

R Pantel (External organisation)

S Fregonese (TU Delft - Old - EWI Ch. Integrated Sensing Devices)

C Maneux (External organisation)

T Zimmer (External organisation)

A Chantre (External organisation)