Chemical-mechanical relationship of amorphous/porous low-dielectric film materials
Journal Article
(2007)
Author(s)
C.A. Yuan (TU Delft - Computational Design and Mechanics)
O van der Sluis (TU Delft - Computational Design and Mechanics)
G. Zhang (TU Delft - Dynamics of Micro and Nano Systems)
Leo Ernst (TU Delft - Computational Design and Mechanics)
Willem van Driel (TU Delft - Dynamics of Micro and Nano Systems)
RBR van Silfhout (External organisation)
B.J. Thijsse (TU Delft - OLD Virtual Materials and Mechanics)
Research Group
Computational Design and Mechanics
DOI related publication
https://doi.org/doi:10.1016/j.commatsci.2007.09.
To reference this document use:
https://resolver.tudelft.nl/uuid:b604f79f-591d-4af2-9ac3-46857341b3ae
More Info
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Publication Year
2007
Research Group
Computational Design and Mechanics
Bibliographical Note
NEO@en
Volume number
42
Pages (from-to)
606-613
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