Poly-silicon films with low impurity concentrtion made by hot wire chemical vapour deposition.
Journal Article
(2001)
Author(s)
REI Schropp (External organisation)
Paul Alkemade (TU Delft - Old - sect Electronic Materials (NS/EM))
JK Rath (External organisation)
Research Group
Old - sect Electronic Materials (NS/EM)
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https://resolver.tudelft.nl/uuid:ede872cc-7aa9-4582-a879-c0d1f1e8ceaf
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Publication Year
2001
Research Group
Old - sect Electronic Materials (NS/EM)
Volume number
65
Pages (from-to)
541-547
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