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1 Characterization of ion emission of an extreme ultraviolet generating discharge produced Sn plasma
article 2010-01-04    
Author: Gielissen, K. · Sidelnikov, Y. · Glushkov, D. · Soer, W.A. · Banine V.Y. · Van der Mullen, J.
Keywords: euv · euv lithography · euv sources · plasma debris
[PDF] [Abstract]

2 Gated pinhole camera imaging of the high-energy ions emitted by a discharge produced Sn plasma for extreme ultraviolet generation
article 2010-10-22    
Author: Gielissen, K. · Sidelnikov, Y. · Glushkov, D. · Soer, W.A. · Banine V.Y. · Van der Mullen, J.J.A.M.
Keywords: euv · euv lithography · euv sources · plasma debris
[PDF] [Abstract]

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