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1 EUV blank defect and particle inspection with high throughput immersion AFM with 1nm 3D resolution
article 2016    
Author: Es, M.H. van · Sadeghian Marnani, H.
Keywords: AFM · EUV mask · Massively parallel · Throughput · Atomic force microscopy · Nanocantilevers · Photomasks · Substrates · Surface topography · Units of measurement · 3D resolution · High throughput · Measurement bandwidth · Oscillation amplitude · Surface characterization · Target application · Process control · High Tech Systems & Materials · Industrial Innovation · Nano Technology · OM - Opto-Mechatronics · TS - Technical Sciences
[PDF] [Abstract]

2 Quantitative tomography with subsurface scanning ultrasound resonance force microscopy
article 2019    
Author: Es, M.H. van · Fillinger, L. · Sadeghian Marnani, H.
Keywords: Buried structures · Critical Dimensions · Imaging · Quantitative · NOMI Nano Opto-Mechatronics Instruments Group · High Tech Systems & Materials · Industrial Innovation
[Abstract]

3 Simultaneous AFM nano-patterning and imaging for photomask repair
article 2016    
Author: Keyvani, A. · Tamer, M.S. · Es, M.H. van · Sadeghian Marnani, H.
Keywords: Electronics · AFM · Nano-Machining · Nano-Scribing · Photomask Repair · Tip-sample interactions · Atomic force microscopy · Photomasks · Repair · Units of measurement · Excitation frequency · High resolution · Imaging process · Nano-Scribing · Nanomachining · NanoPatterning · Photomask repair · Tip-sample interaction · Process control · Nano Technology · OM - Opto-Mechatronics · TS - Technical Sciences
[PDF] [Abstract]

4 Sounding out buried nanostructures using subsurface ultrasonic resonance force microscopy
article 2018    
Author: Es, M.H. van · Mohtashami, A. · Neer, P.L.M.J. van · Sadeghian Marnani, H.
Keywords: Nanostructures · Scanning probe microscopy · Ultrasonic applications · Viscoelasticity · Contact resonance · Fundamental research · Nanoscale structure · Semiconductor manufacturing · Semiconductor manufacturing process · Ultrasonic force microscopy · Ultrasonic resonances · Viscoelastic properties · Atomic force microscopy
[Abstract]

5 Image-based overlay and alignment metrology through optically opaque media with sub-surface probe microscopy
other 2018    
Author: Es, M.H. van · Mohtashami, A. · Piras, D. · Sadeghian Marnani, H.
Keywords: Electronics · Defects · On-cell · Overlay and alignment · Scanning probe microscopy · High Tech Systems & Materials · Industrial Innovation
[Abstract]

6 Frequency Modulation Sub-surface Atomic Force Microscopy
report 2019    
Author: Keyvani Janbahan, A. · Tamer, M.S. · Es, M.H. van · Lans, M.J. van der
Keywords: Frequency · Frequency modulation · Microscopy · Sub-surface atomic force microscopy · ERP Early Research Program · ERP 3D Nanomanufacturing Instruments · High Tech Systems & Materials · Industrial Innovation
[Abstract]

7 Advanced Processing for Quantitative Sub-surface Data Extraction
report 2019    
Author: Fillinger, L. · Tamer, M.S. · Es, M.H. van · Lans, M.J. van der
Keywords: Quantitative sub-surface data extraction · Advanced processing · Scanning probe microscopy · SPM · ERP Early Research Program · ERP 3D Nanomanufacturing Instruments · High Tech Systems & Materials · Industrial Innovation
[Abstract]

8 High Resolution SubSurface Probe Microscopy for node5 applications
report 2019    
Author: Es, M.H. van · Fillinger, L. · Tamer, M.S. · Lans, M.J. van der
Keywords: Microscopy · Node5 applications · High Resolution SubSurface Probe Microscopy · Imaging of nanoscale structures · Nanoscale structures · Scanning Subsurface Probe Microsopy (SSPM) · ERP Early Research Program · ERP 3D Nanomanufacturing Instruments · High Tech Systems & Materials · Industrial Innovation
[Abstract]

9 Electrostatically actuated probes for Scanning Subsurface Ultrasonic Resonance Frequency Microscopy
report 2019    
Author: Es, M.H. van · Riel, M.C.J.M. van · Duivenvoorde, T. · Sadeghian Marnani, H.
Keywords: Electrostatically actuated probes · Microscopy · Scanning Subsurface Ultrasonic Frequency Microsopy (SSUFM) · ERP Early Research Program · ERP 3D Nanomanufacturing Instruments · High Tech Systems & Materials · Industrial Innovation
[Abstract]

10 Subsurface Ultrasonic Resonant Force Microscopy for Image-based Overlay Measurement
report 2019    
Author: Tamer, M.S. · Es, M.H. van · Sadeghian Marnani, H. · Lans, M.J. van der
Keywords: Subsurface ultrasonic resonant force microscopy (SSURFM) · Microscopy · Image-based Overlay Measurement · Scanning probe microscopy (SPM) · ERP Early Research Program · ERP 3D Nanomanufacturing Instruments · High Tech Systems & Materials · Industrial Innovation
[Abstract]

11 Results from the Large Dynamic Range Atomic Force Microscope
report 2019    
Author: Peters, J. · Herfst, R. · Witvoet, G. · Kuiper, S. · Es, M.H. van · Willekers, R.W.
Keywords: Telescopes · Large Dynamic Range Atomic Force Microscope · LDR-AFM · ERP Early Research Program · ERP 3D Nanomanufacturing Instruments · High Tech Systems & Materials · Industrial Innovation
[PDF] [Abstract]

12 High-throughput scanning probe instruments for nanopatterning, alignment, and overlay metrology
article 2018    
Author: Navarro, V. · Mohtashami, A. · Herfst, R.W. · Maturova, K. · Es, M.H. van · Piras, D. · Sadeghian Marnani, H.
Keywords: Electronics · Alignment and overlay · Patterning · Scanning probe lithography · Extreme ultraviolet lithography · Manufacture · Nanotechnology · Scanning probe microscopy · Contact holes · High throughput · Sub-surface imaging · High Tech Systems & Materials · Industrial Innovation
[Abstract]

13 Mapping buried nanostructures using subsurface ultrasonic resonance force microscopy
article 2018    
Author: Es, M.H. van · Mohtashami, A. · Thijssen, R.M.T. · Piras, D. · Neer, P.L.M.J. van · Sadeghian, H.
Keywords: Vision · Scanning probe · Subsurface microscopy · Buried features · Ultrasound · 2015 Nano Technology · OM - Opto-Mechatronics · TS - Technical Sciences
[Abstract]

14 Towards Quantitative Stiffness based Subsurface AFM
report 2019    
Author: Piras, D. · Fillinger, L. · Rajadurai, S.R.S. · Es, M.H. van · Lans, M.J. van der
Keywords: Quantitative stiffness based Subsurface AFM · ERP Early Research Program · 3D Nanomanufacturing Instruments · High Tech Systems & Materials · Industrial Innovation
[Abstract]

15 Development of a detachable high speed miniature scanning probe microscope for large area substrates inspection
article 2015    
Author: Sadeghian Marnani, H. · Herfst, R.W. · Winters, J. · Crowcombe, W.E. · Kramer, G.F.I. · Dool, T.C. van den · Es, M.H. van
Keywords: Electronics · High Tech Systems & Materials · Industrial Innovation · Nano Technology · OM - Opto-Mechatronics · TS - Technical Sciences
[Abstract]

16 Advanced excitation waveforms in ultrasound sub-surface atomic force microscopy
report 2019    
Author: Rajadurai, S.R.S. · Piras, D. · Hatakeyama, K. · Neer, P.L.M.J. · Es, M.H. van · Lans, M.J. van der
Keywords: Waveforms · Advanced excitation waveforms · Microscopy · Ultrasound sub-surface atomic force microscopy · ERP Early Research Program · ERP 3D Nanomanufacturing Instruments · High Tech Systems & Materials · Industrial Innovation
[Abstract]

17 Feasibility of Top Actuated Scattering Based Subsurface Scanning Probe Microscopy (SSPM)
report 2019    
Author: Neer, P.L.M.J. van · Quesson, B.A.J. · Es, M.H. van · Piras, D. · Lans, M.J. van der
Keywords: Top actuated scattering · Feasibility · Microscopy · Subsurface Scanning Probe Microsopy (SSPM) · ERP Early Research Program · ERP 3D Nanomanufacturing Instruments · High Tech Systems & Materials · Industrial Innovation
[Abstract]

18 Deep subsurface imaging with subsurface probe micro-scopy @ GHZ
report 2019    
Author: Neer, P.L.M.J. van · Es, M.H. van · Piras, D. · Navarro, V. · Mohtashami, A. · Lans, M.J. van der · Sadeghian Marnani, H.
Keywords: Deep surface imaging · Microscopy · GHz SPM · Atomic Force Microsopy (AFM) · Subsurface Probe Microscopy (SSPM) · ERP Early Research Program · ERP 3D Nanomanufacturing Instruments · High Tech Systems & Materials · Industrial Innovation
[Abstract]

19 Optimization of acoustic coupling for bottom actuated scattering based subsurface scanning probe microscopy
article 2019    
Author: Neer, P.M.L.J. van · Quesson, B.A.J. · Es, M.H. van · Riel, M.C.J.M. van · Hatakeyama, K. · Mohtashami, A. · Piras, D. · Duivenvoorde, T. · Lans, M.J. van der · Sadeghian Marnani, H.
Keywords: Subsurface scanning probe microscopy · Acoustic coupling · Scattering · NOMI Nano Opto-Mechatronics Instruments Group · High Tech Systems & Materials · Industrial Innovation
[Abstract]

20 Development of a sample clamp for GHZ subsurface probe microscopy
report 2019    
Author: Neer, P.L.M.J. van · Riel, M.C.J.M. van · Es, M.H. van · Shoeibi Omrani, P.S. · Hatakeyama, K. · Mohtasami, A. · Quesson, B.A.J. · Lans, M.J. van der · Sadeghian Narnani, H.
Keywords: GHZ subsurface probe microscopy · Microscopy · Sample clamp · ERP Early Research Program · ERP 3D Nanomanufacturing Instruments · High Tech Systems & Materials · Industrial Innovation

Search results also available in MS Excel format.

Showing 1 to 20 of 20 found. | Sort by date