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1 Nano-engineering with a focused helium ion beam
article 2011    
Author: Maas, D.J. · Drift, E.W. van der · Veldhoven, E. van · Meessen, J. · Rudneva, M. · Alkemade, P.F.A.
Keywords: Physics · High Tech Systems & Materials · Industrial Innovation · Physics & Electronics · NI - Nano Instrumentation · TS - Technical Sciences
[Abstract]

2 Sub-50 nm metrology on extreme ultra violet chemically amplified resist: a systematic assessment
article 2015    
Author: Maas, D.J. · Fliervoet, T. · Herfst, R.W. · Veldhoven, E. van · Meessen, J. · Vaenkatesan, V. · Sadeghian Marnani, H.
Keywords: Electronics · High Tech Systems & Materials · Industrial Innovation · Nano Technology · NI - Nano Instrumentation OM - Opto-Mechatronics · TS - Technical Sciences
[Abstract]

3 Evaluation of EUV resist performance below 20nm CD using helium ion lithography
article 2014    
Author: Maas, D.J. · Veldhoven, E. van · Langen-Suurling, A. van · Alkemade, P.F.A. · Wuister, S. · Hoefnagels, R. · Verspaget, C. · Meessen, J. · Fliervoet, T.
Keywords: Nanotechnology · Energy transfer · EUV lithography · EUV resist characterization · Helium Ion Microscope · Lithography · Proximity effect · Scanning Helium Ion Beam Lithography · Electron beam lithography · Extreme ultraviolet lithography · Proximity correction · High Tech Systems & Materials · Industrial Innovation · Physics & Electronics · NI - Nano Instrumentation · TS - Technical Sciences
[PDF] [Abstract]

4 Evaluation of EUV resist performance below 20nm CD using helium ion lithography
report 2014    
Author: Maas, D.J. · Veldhoven, E. van · Pohlmann, R.C.M. · Langen-Suurling, A. van · Alkemade, P.F.A. · Wulster, S. · Hoefnagels, R. · Verspaget, C. · Meessen, J. · Fliervoet, T.
Keywords: Nanotechnology · Energy transfer · EUV lithography · EUV resist characterization · Helium Ion Microscope · Lithography · Proximity effect · Scanning Helium Ion Beam Lithography · Electron beam lithography · Extreme ultraviolet lithography · Proximity correction · High Tech Systems & Materials · Industrial Innovation · Physics & Electronics · NI - Nano Instrumentation · TS - Technical Sciences
[PDF]

Search results also available in MS Excel format.

Showing 1 to 4 of 4 found. | Sort by date