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1 Atomic Layer Processing: basics, materials, processes & applications
lecture 2017    
Author: Roozeboom,F.
Keywords: Materials Physics · Atomic layer deposition · ALD · Processes · Applications · Industrial Innovation · Nano Technology · TFT - Thin Film Technology · TS - Technical Sciences

2 Perspectives of Atomic Layer Etching and related processing
lecture 2016    
Author: Roozeboom, F.
Keywords: Materials · Atomic layer etching · ALE · Nanowire · Atomic layer processing · Litography · Industrial Innovation · 2015 Nano Technology · HOL - Holst · TS - Technical Sciences

3 New options in advanced atomic layer processing
lecture 2016    
Author: Roozeboom, F.
Keywords: Materials · Atomic layer deposition · ALD · Atomic layer etching · ALE · Industrial Innovation · 2015 Nano Technology · TFT - Thin Film Technology · TS - Technical Sciences

4 Atomic Layer Processing : basics, materials, processes & applications
lecture 2017    
Author: Roozeboom, F.
Keywords: Materials Physics · Atomic layer processing · Industrial Innovation · Nano Technology · HOL - Holst · TS - Technical Sciences

5 Atomic Layer Etching&Area-Selective Atomic Layer Deposition
lecture 2019    
Author: Roozeboom, F.
Keywords: Chemistry Physics Materials · Atomic layer etching · ALE · Atomic layer deposition · ALD · Area-selective deposition · Industrial Innovation

6 Silicon Compatible Emerging Materials,Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 9
article 2019    
Author: Roozeboom, F.

7 High-mobility channels in Thin Film Transistors made from amorphous indium zinc oxide (IZO) semiconductor films grown by atmospheric pressure plasma-enhanced spatial ALD
lecture 2017    
Author: Roozeboom, F. · Et al.
Keywords: Materials Physics · Atomic layer deposition · Spatial ALD · Thin film transistors · IZO · Indium zinc oxides · Industrial Innovation · Nano Technology · HOL - Holst · TS - Technical Sciences

8 Energy system comprising an electrochemical energy source
other 2010    
Author: Roozeboom, F. · Notten, P.
Keywords: Energy Electronics · Industrial Innovation · Mechatronics, Mechanics & Materials · TFT - Thin Film Technology · TS - Technical Sciences
[Abstract]

9 Werkstress te lijf: hoe herken je de druppel?
article 2015    
Author: Bakhuys Roozeboom, F.
Keywords: Workplace · Jongeren · Stress · Werkdruk · Burnout · Verzuim · Arbeidsbelasting · Work and Employment · Healthy Living · Life · WHC - Work, Health and Care · ELSS - Earth, Life and Social Sciences
[PDF] [Abstract]

10 Editorial
article 2015    
Author: Korkin, A. · Mueller, P. · Roozeboom, F.
Keywords: Informatics Energy · Energy consumption · Information storage · Energy storage · Renewable energy · Nanotechnology · Solar energy · Information Society · Mechanics, Materials and Structures · TFT - Thin Film Technology · TS - Technical Sciences

11 Recent Advances in Atmospheric Vapor-Phase Deposition of Transparent and Conductive Zinc Oxide
article 2014    
Author: Illiberi, A. · Poodt, P. · Roozeboom, F.
Keywords: Chemistry · ALD · Atmospheric pressure · PE-CVD · Transparent conductive oxides · Zinc oxide · Industrial Innovation · Mechanics, Materials and Structures · TFT - Thin Film Technology TFT - Thin Film Technology · TS - Technical Sciences
[Abstract]

12 Assembly, chip and method of operating
other 2012    
Author: Reefman, D. · Roozeboom, F. · Klootwijk, J.H.
Keywords: Electronics · Industrial Innovation · Mechatronics, Mechanics & Materials · TFT - Thin Film Technology · TS - Technical Sciences
[Abstract]

13 Precision in harsh environments
article 2016    
Author: French, P. · Krijnen, G. · Roozeboom, F.
Keywords: Materials · Atomic layer deposition · ALD · Harsh environments · Micro-fabrication technology · Nano-fabrication technology · Packaging · Sensors · Industrial Innovation · Nano Technology · TFT - Thin Film Technology · TS - Technical Sciences
[Abstract]

14 On the role of individual etching components in selective atomic layer processing: Etch and deposit to afford high selectivity
lecture 2019    
Author: Mameli, A. · Roozeboom, F. · Poodt, P.
Keywords: Atomic layer etching · ALE · ZnO · Atomic layer deposition · ALD · Plasma etching · Zinc oxide · Industrial Innovation

15 Area-selective deposition of SiO2 based on spatial ALD with interleaved etching steps to obtain high selectivity
lecture 2019    
Author: Mameli, A. · Roozeboom, F. · Poodt, P.
Keywords: Atomic layer etching · ALE · SiO2 · Atomic layer deposition · Spatial ALD · Etching · Industrial Innovation
[Abstract]

16 Area-selective deposition of SiO2 based on spatial ALD with interleaved etching steps to obtain selectivities > 10 nm
lecture 2019    
Author: Mameli, A. · Roozeboom, F. · Poodt, P.
Keywords: Atomic layer etching · ALE · SiO2 · Atomic layer deposition · Spatial ALD · Etching · Industrial Innovation

17 Area-selective atmospheric-pressure spatial ALD of SiO2 using interleaved back-etch steps yielding selectivity > 10 nm
lecture 2019    
Author: Mameli, A. · Roozeboom, F. · Poodt, P.
Keywords: Atomic layer etching · ALE · SiO2 · Atomic layer deposition · Spatial ALD · Etching · Industrial Innovation

18 Plasma technology for spatial ALD of conductive layers
lecture 2017    
Author: Creyghton, Y. · Illiberi, A. · Roozeboom, F.
Keywords: Materials Physics · Atomic layer deposition · Spatial ALD · Plasma technology · Conductive layers · Industrial Innovation · Nano Technology · HOL - Holst · TS - Technical Sciences

19 Overview of doctoral theses on Atomic Layer Deposition collected in the Virtual Project on the History of ALD
lecture 2019    
Author: Aarik, J. [et al.] · Roozeboom, F.
Keywords: Theses · Atomic layer deposition · ALD · Industrial Innovation
[Abstract]

20 Atmospheric spatial atomic layer deposition of in-doped ZnO
article 2014    
Author: Illiberi, A. · Scherpenborg, R. · Roozeboom, F. · Poodt, P.
Keywords: Energy Materials Industry Electronics · Indium-doped ZnO · Spatial atomic layer deposition · Carrier density · Resistivity · Transparancy · Industrial Innovation · Mechanics, Materials and Structures · TFT - Thin Film Technology · TS - Technical Sciences
[Abstract]

Search results also available in MS Excel format.

Showing 1 to 20 of 148 found. Next | Sort by date