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1 Characterization of electron-beam- and EUV photon-induced secondary electron emission
lecture 2016    
Author: Hoeseni, F.I. · Theulings, A.M.M.G. · Hagen, K. · Veldhoven, J. van · Maas, D.J.
Keywords: Electronics · High Tech Systems & Materials · Industrial Innovation · Nano Technology · NI - Nano Instrumentation · TS - Technical Sciences
[Abstract]

2 Contamination control: removing small particles from increasingly large wafers
article 2012    
Author: Jong, A.J. de · Donck, J.C.J. van der · Huijser, T. · Kievit, O. · Koops, R. · Koster, N.B. · Molkenboer, F.T. · Theulings, A.M.M.G.
Keywords: Chemistry · 450 mm wafers · Cleaning of molecular layers · High voltage cleaning · Particle cleaning · Plasma cleaning · Tacky rollers · Vacuum compatible cleaning · Industrial Innovation · Building Engineering & Civil Engineering Physics & Electronics · ECS - Energy & Comfort Systems NI - Nano Instrumentation · TS - Technical Sciences
[PDF] [Abstract]

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