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1 SOI based mechano-optical pressure sensor using a folded micro ring resonator
article 2012    
Author: Chakkalakkal Abdulla, S.M.C. · Harmsma, P.J. · Nieuwland, R.A. · Pozo Torres, J.M. · Lemmen, M.H.J. · Sadeghian Marnani, H. · Berg, J.H. van den · Bodis, P. · Buskens, P.
Keywords: Electronics · Pressure sensor · integrated optic sensor · micro ring resonator · wavelength shift · Industrial Innovation · Physics & Electronics · OPT - Optics · TS - Technical Sciences
[Abstract]

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