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1 Mini plasma cleaner
lecture 2015    
Author: Bekman, H.H.P.T. · Bolt, R.J. · Nennie, F.A. · Muilwijk, P.M. · Molkenboer, F.T. · Koster, N.B. · Kievit, O.
Keywords: Nanotechnology · High Tech Systems & Materials · Industrial Innovation · Nano Technology Observation, Weapon & Protection Systems Fluid & Solid Mechanics · NI - Nano Instrumentation RT - Radar Technology HTFD - Heat Transfer & Fluid Dynamics · TS - Technical Sciences

2 Vacuum architecture of an EUV exposure system
lecture 2015    
Author: Molkenboer, F.T. · Koster, N.B. · Naron, D.J. · Deutz, A.F.
Keywords: Nanotechnology · High Tech Systems & Materials · Industrial Innovation · Nano Technology · NI - Nano Instrumentation SSE - Space Systems Engineering · TS - Technical Sciences

Search results also available in MS Excel format.

Showing 1 to 2 of 2 found. | Sort by date