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1 Interferometry for picometer-level dimensional stability measurements
article 2011    
Author: Voigt, D. · Ellis, J.D. · Verlaan, A.L. · Bergmans, R.H. · Spronck, J.W. · Munnig Schmidt, R.H.
Keywords: Air refractive index · Balanced configurations · Beam path · Close proximity · Common mode rejections · Constructional elements · Contact less · Cost factors · Cycle stability · In-situ · Industrial equipment · Instability events · Measurement uncertainty · Optical heterodyne interferometer · Optical scheme · Recalibrations · Reference beams · Sampling rates · Semiconductor industry · Space missions · Stability measurements · Thermal drifts · Time-scales · Typical samples · Vacuum tube · Zerodur · Bolted joints · Electron optics · Interferometers · Interferometry · Optics · Quantum electronics · Refractive index · Refractometers · Semiconductor device manufacture · Semiconductor lasers · Silicon carbide · Thermal expansion · Uncertainty analysis · Dimensional stability · Physics & Electronics · OPT - Optics · TS - Technical Sciences
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