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1 A set of innovative immersed grating based spectrometer designs for METIS
article 2014    
Author: Agócs, T. · Navarro, R. · Venema, L. · Amerongen, A.H. van · Tol, P.J.J. · Brug, H. van · Brandl, B.R. · Molster, F. · Todd, S.
Keywords: Electronics · Astronomy · E-ELT · Immersed grating · METIS · Mid-infrared · Diffraction gratings · Infrared devices · Optical design · Optical testing · Refractive index · Semiconducting silicon · Semiconductor device manufacture · Spectrographs · Spectrometers · Telescopes · Optimization techniques · Semiconductor industry · Silicon micromachining · Three mirror anastigmats · High Tech Systems & Materials · Industrial Innovation · Physics & Electronics · OPT - Optics · TS - Technical Sciences
[PDF] [Abstract]

2 Characterizing electron beam induced damage in metrology and inspection of advance devices
article 2017    
Author: Mohtashami, A. · Navarro, V. · Sadeghian Marnani, H. · Englard, I. · Shemesh, D. · Malik, N.S.
Keywords: Electronics · Chemical mechanical polishing · Chemical polishing · Electron beams · Hydrophobicity · Semiconductor device manufacture · Silicon wafers · Units of measurement · 300-mm silicon wafers · E-beam damage · High resolution · Low-k materials · Optical metrology techniques · Scanning probe microscopy techniques · Semiconductor industry · Semiconductor manufacturing · Scanning probe microscopy · Nano Technology · OM - Opto-Mechatronics · TS - Technical Sciences

3 Interferometry for picometer-level dimensional stability measurements
article 2011    
Author: Voigt, D. · Ellis, J.D. · Verlaan, A.L. · Bergmans, R.H. · Spronck, J.W. · Munnig Schmidt, R.H.
Keywords: Air refractive index · Balanced configurations · Beam path · Close proximity · Common mode rejections · Constructional elements · Contact less · Cost factors · Cycle stability · In-situ · Industrial equipment · Instability events · Measurement uncertainty · Optical heterodyne interferometer · Optical scheme · Recalibrations · Reference beams · Sampling rates · Semiconductor industry · Space missions · Stability measurements · Thermal drifts · Time-scales · Typical samples · Vacuum tube · Zerodur · Bolted joints · Electron optics · Interferometers · Interferometry · Optics · Quantum electronics · Refractive index · Refractometers · Semiconductor device manufacture · Semiconductor lasers · Silicon carbide · Thermal expansion · Uncertainty analysis · Dimensional stability · Physics & Electronics · OPT - Optics · TS - Technical Sciences
[Abstract]

Search results also available in MS Excel format.

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