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1 Modeling the residual shrinkage during lithographic processing on flexible polymer substrates
article 2010    
Author: Barink, M. · Berg, D. van den · Yakimets, I. · Meinders, E.R.
Keywords: Electronics · Accurate prediction · Electronic circuitry · Electronic device · Experimental investigations · Feature sizes · Flexible polymer substrates · Lithographic processing · Modeling approach · Overlay errors · Polymer foil · Production process · Temperature dependent · Visco-elastic material · Deformation · Microelectronics · Microsystems · Polymers · Shrinkage · Substrates · High Tech Systems & Materials · Industrial Innovation · Mechatronics, Mechanics & Materials · HOL - Holst · TS - Technical Sciences
[Abstract]

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