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Silicon integrated optomechanical sensors

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Author: Westerveld, W.J. · Pozo Torres, J.M. · Muilwijk, P.J. · Harmsma, P.J. · Nieuwland, R.A. · Berg, J.H. van den · Tabak, E. · Dool, T.C. van den · Leinders, S.M. · Dongen, K.W.A. van · Yousefi, M. · Urbach, H.P.
Type:article
Date:2012
Source:WS7: Low-Cost Open Access to Photonic Integration Technology. 4th European Photonic Integration Forum, part of the 38th European Conference and Exhibition on Optical Communication (ECOC) 2012, Amsterdam, The Netherlands, September 16, 2012
Identifier: 464716
Keywords: Physics · High Tech Systems & Materials · Industrial Innovation · Physics & Electronics · NI - Nano Instrumentation · TS - Technical Sciences