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A comprehensive model for transient behavior of tapping mode atomic force microscope

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Author: Keyvani, A. · Tamer, M.S. · Wingerden, J.W. van · Goosen, J.F.L. · Keulen, F. van
Publisher: Springer
Place: New York
Source:Nonlinear Dynamics
Identifier: 868194
doi: doi:10.1007/s11071-019-05079-2
Keywords: Tapping mode AFM · Transient analysis · Modulated model · Chaos · Speed limit of AFM · Atomic force microscope · Microscopy · High Tech Systems & Materials · Industrial Innovation


Many investigations have focused on steady-state nonlinear dynamics of cantilevers in tapping mode atomic force microscopy (TM-AFM). However, a transient dynamic model?which is essential for a model-based control design?is still missing. In this paper, we derive a mathematical model which covers both the transient and steady-state behavior. The steady-state response of the proposed model has been validated with existing theories. Its transient response, however, which is not covered with existing theories, has been successfully verified with experiments. Besides enabling model-based control design for TM-AFM, this model can explain the high-end aspects of AFM such as speed limitation, image quality, and eventual chaotic behavior.