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SOI based mechano-optical pressure sensor using a folded micro ring resonator

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Author: Chakkalakkal Abdulla, S.M.C. · Harmsma, P.J. · Nieuwland, R.A. · Pozo Torres, J.M. · Lemmen, M.H.J. · Sadeghian Marnani, H. · Berg, J.H. van den · Bodis, P. · Buskens, P.
Source:Proceedings of the 9th Nanomechanical Sensing Workshop, June 2012, IITBombay, Mumbai, India, 80-81
Identifier: 462712
Keywords: Electronics · Pressure sensor · integrated optic sensor · micro ring resonator · wavelength shift · Industrial Innovation · Physics & Electronics · OPT - Optics · TS - Technical Sciences


A compact, mass producible Silicon On Insulator (SOI) based pressure sensor consisting of a folded Micro Ring Resonator (MRR) on a circular diaphragm is successfully designed, fabricated and characterized. An application of pressure deflects the diaphragm, causing stress in the MRR, which elongates the waveguide length and changes the effective refractive index of the guided mode. This results in a shift in its resonant wavelengths, which represents the applied pressure. This integrated device is successfully fabricated and a linear dependence between the resonance wavelength shift and the applied pressure at a constant temperature is measured. Such a pressure sensor finds applications in environments in which only minimal invasion is tolerated.