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Feasibility study of photo thermal acoustic imaging of buried nanowires in Gate-All-Around Nanowire FETs

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Author: Neer, P.L.M.J. van · Piras, D. · Koek, W. · Zwet, E. van · Sadeghian, H.
Type:article
Date:2017
Publisher: IEEE Computer Society
Source:2017 IEEE International Ultrasonics Symposium, IUS 2017. 6 September 2017 through 9 September 2017
Identifier: 782913
doi: doi:10.1109/ULTSYM.2017.8092069
ISBN: 9781538633830
Article number: 8092069
Keywords: Nanowire · Photo Thermal Acoustic Imaging · PTAI · 2015 Nano Technology 2015 Observation, Weapon & Protection Systems · OM - Opto-Mechatronics OPT - Optics AS - Acoustics & Sonar · TS - Technical Sciences