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Basic Opto-electronics on Silicon for Sensor Applications

Author: Joppe, J.L. · Bekman, H.H.P.T. · Krijger, A.J.T. de · Lambeck, P.V. · Chalmers, J. · Holleman, J. · Ikkink, T. · Kranenburg, H. van · Zhou, M.J.
Publisher: Platform Sensor Technology
Institution: TNO Fysisch en Elektronisch Laboratorium
Source:Lambeck, P.V., Proceedings of the Dutch Conference on Sensor Technology 1994, University of Twente, Enschede, The Netherlands, February 17-18, 1994, 189-193
Identifier: 94688
Keywords: Physics · Sensors · Opto-electronics · Silicon · Sensor integration · Micro sensors


A general platform for integrated opto-electronic sensor systems on silicon is proposed. The system is based on a hybridly integrated semiconductor laser, ZnO optical waveguides and monolithic photodiodes and electronic circuiry.