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Technological and Physical Compatibilities in Hybrid Integration of Laser and Monolithic Integration of Waveguide, Photodetector and CMOS Circuits on Silicon

Author: Zhou, M.J. · Ikkink, T. · Chalmers, J. · Kranenburg, H. van · Albers, H. · Holleman, J. · Lambeck, P.V. · Joppe, J.L. · Bekman, H.H.P.T. · Krijger, A.J.T. de
Publisher: Platform Sensor Technology
Institution: TNO Fysisch en Elektronisch Laboratorium
Source:Lambeck, P.V., Proceedings of the Dutch Conference on Sensor Technology 1994, University of Twente, Enschede, The Netherlands, February 17-18, 1994, 205-210
Identifier: 94689
Keywords: Physics


In this paper, technological and physical compatibilities in hybrid integration of AlInGaP laser and monolithic integration of ZnO monomode waveguide, pin-photodetector, CMOS circuits for laser power control and signal amplification on silicon substrate are studied. Prospective problems and their possible solutions are discussed. Also experimental results are presented.