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A design-of-experiments approach to characterizing beam-induced deposition in the helium ion microscope

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Author: Scipioni, L. · Sanford, C. · Veldhoven, E. van · Maas, D.
Type:article
Date:2011
Source:Microscopy Today, 3, 19, 22-26
Identifier: 445274
Keywords: Chemistry · Industrial Innovation · Physics & Electronics · NI - Nano Instrumentation · TS - Technical Sciences