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Actuator tests for a large deformable membrane mirror

Author: Hamelinck, R.F.M.M. · Rosielle, P.C.J.N. · Steinbuch, M. · Ellenbroek, R.M.L. · Verhaegen, M. · Doelman, N.J.
Institution: TNO Industrie en Techniek
Source:Advances in Adaptive Optics II, 24-31 May 2006, Orlando, FL, USA, 6272 II
Identifier: 534113
ISBN: 9780819463371
Article number: 627225
Keywords: Coils · Electromagnetic · Helmholtz · Actuators · Demagnetization · Ferromagnetic materials · Magnetic circuits · Optical design · Permanent magnets · Deformable membrane mirror · Magnet thickness · Out-of-plane displacements · Mirrors


In the design of a large adaptive deformable membrane mirror, variable reluctance actuators are used. These consist of a closed magnetic circuit in which a strong permanent magnet provides a static magnetic force on a ferromagnetic core which is suspended in a membrane. By applying a current through the coil which is situated around the magnet, this force is influenced, providing movement of the ferromagnetic core. This movement is transferred via a rod imposing the out-of-plane displacements in the reflective deformable membrane. In the actuator design a match is made between the negative stiffness of the magnet and the positive stiffness of the membrane suspension. If the locality of the influence functions, mirror modes as well as force and power dissipation are taken into account, a resonance frequency of 1500 Hz and an overall stiffness of 1000 N/m for the actuators is needed. The actuators are fabricated and the dynamic response tested in a dedicated setup. The Bode diagram shows a first eigenfrequency of 950 Hz. This is due to a lower magnetic force than expected. A Helmholtz coil setup was designed to measure the differences in a large set of permanent magnets. With the same setup the 2 nd quadrant of the B-H curve is reconstructed by stacking of the magnets and using the demagnetization factor. It is shown that the values for Hc and Br of the magnets are indeed lower than the values used for the initial design. New actuators, with increased magnet thickness, are designed and currently fabricated.