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Quantification of the atomic hydrogen flux as a function of filament temperature and H2 flow rate

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Author: Ugur, D. · Storm, A.J. · Verberk, R. · Brouwer, J.C. · Sloof, W.G.
Type:article
Date:2012
Publisher: American Vacuum Society
Source:Journal of Vacuum Science Technology A, January/February, 3, 30, 031603-1 - 031603-6
Identifier: 462705
Keywords: Electronics · Industrial Innovation · Physics & Electronics · NI - Nano Instrumentation · TS - Technical Sciences TS - Technical Sciences