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Towards a fibre to waveguide coupling scheme

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Author: Berg, J.H. van den · Nieuwland, R.A. · Bodis, P. · Harmsma, P.J. · Agovic, K. · Yousefi, M.
Place: Delft
Institution: TNO Industrie en Techniek
Source:Proceedings Symposium IEEE Photonics Benelux Chapter. Proc. 2010 Annual Symposium of the IEEE Photonics Society Benelux Chapter, Delft, The Netherlands, November 2010, 229-232
Identifier: 427940
Keywords: Physics · Physics & Electronics · NI - Nano Instrumentation · TS - Technical Sciences


Silicon based SOI PICs are finding new applications in the field of sensing. Since Silicon does not produce light, to deploy these sensors in real-world applications a fiber-chip connection is required. In this work we detail the fabrication of V-grooves for fiber attachment to the chip, including the design, (hard) masking and the etching process. Our results show that V-groove attached fibre is an optimized solution for SOI based sensor PICs.