The generation and decomposition rate of volatile tin hydrides (SnH 4) was determined with two quartz crystal microbalances (QCM). One crystal covered with Sn was exposed to a known flux of atomic hydrogen (H) to generate SnH 4. Another Au coated QCM was placed opposite to the Sn coated surface to determine the decomposition characteristics of the generated SnH 4. The chemical nature and the morphology of the deposits were investigated with X-ray Photoelectron Spectroscopy (XPS) and Scanning Electron Microscopy (SEM), respectively. © 2012 Elsevier B.V. All rights reserved.