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Application of the helium ion microscope as a sculpting tool for nanosamples

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Author: Rudneva, M. · Veldhoven, E. van · Malladi, S. · Maas, D.J. · Zandbergen, H.W.
Source:2012 MRS Spring Meeting, 9-13 April 2012, San Francisco, CA, USA, 1455, 61-72
Materials Research Society Symposium Proceedings
Identifier: 474208
ISBN: 9781627482516
Keywords: Physics · High Tech Systems & Materials · Industrial Innovation · Physics & Electronics · NI - Nano Instrumentation · TS - Technical Sciences


In this paper we propose a few helium ion microscope (HIM)-based methods for sample preparation and modification. In particular we report the use of the HIM to make thin wedge SrTiO3 samples without significant artifacts, the possibility to reshape thin metal lines on an electron transparent membrane and the new method of HIM sample preparation by in situ heating of the samples during He-beam illumination. © 2012 Materials Research Society.