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Extension of Marcatili's analytical approach for 220 nm high waveguides in SOI technology

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Author: Westerveld, W.J. · Leinders, S.M. · Pozo Torres, J.M. · Dongen, K.W.A. van · Yousefi, M. · Urbach, H.P.
Source:Proceedings of the 17th Annual Symposium of the IEEE Photonics Society Benelux Chapter, Mons, Belgium, November 29, 2012, 25-28
Identifier: 470116
Keywords: Electronics · electromagnetic fields · electromagnetic propagation · integrated optics · optical sensors · optical waveguides · silicon-on-insulator (SOI) technology · Industrial Innovation · Physics & Electronics · NI - Nano Instrumentation · TS - Technical Sciences


Marcatili’s famous approximate analytical description of light propagating through rectangular dielectric waveguides, published in 1969, gives accurate results for low-indexcontrast waveguides. However, silicon-on-insulator (SOI) technology has become one of the focus platforms for integrated optics over the last decade, and the silicon waveguides have a very high-index-contrast. In this paper, we improve Marcatili’s model by adjusting the amplitudes of the components of the electromagnetic fields. Our improved method shows much better agreement with rigorous numerical simulations of SOI waveguides.