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Deep subsurface imaging with subsurface probe micro-scopy @ GHZ

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Author: Neer, P.L.M.J. van · Es, M.H. van · Piras, D. · Navarro, V. · Mohtashami, A. · Lans, M.J. van der · Sadeghian Marnani, H.
Publisher: TNO
Place: Delft
Source:SID Semicon Innovation Day, Science Centre Delft, 21 May 2019
Identifier: 867691
Keywords: Deep surface imaging · Microscopy · GHz SPM · Atomic Force Microsopy (AFM) · Subsurface Probe Microscopy (SSPM) · ERP Early Research Program · ERP 3D Nanomanufacturing Instruments · High Tech Systems & Materials · Industrial Innovation


This work details the initial simulation and experimental GHz SPM work carried out at TNO.