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Towards contactless scanning thermal microscopy: measuring probe-sample separation

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Author: Bijster, R.J.F. · Sadeghian Marnani, H. · Keulen, F. van
Type:article
Date:2018
Publisher: TNO
Place: Delft Eindhoven
Source:15th International Workshop on Nanomechanical Sensing, Incheon, South Korea, 26-29 June 2018
Identifier: 865840
Keywords: NOMI Nano Opto-Mechatronics Instruments Group · High Tech Systems & Materials · Industrial Innovation