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Sensing platform based on micro-ring resonator and on-chip reference sensors in SOI

Author: Chakkalakkal Abdulla, S.M.C. · Boer, B.M. de · Pozo Torres, J.M. · Berg, J.H. van den · Abutan, A.E. · Hagen, R.A.J. · Lo Cascio, D.M.R. · Harmsma, P.J.
Publisher: SPIE
Source:Silicon Photonics IX, 3-5 February 2014, San Francisco, CA, USA, 8990
Proceedings of SPIE - The International Society for Optical Engineering
Identifier: 507136
ISBN: 9780819499035
Article number: 89900W
Keywords: Electronics · Biosensing on chip · Free space coupling · Micro ring resonators · SU8 · Temperature compensation · Optical fiber coupling · Photonic devices · Readout systems · Sensors · Stresses · Free space coupling · Optical resonators · Industrial Innovation · Physics & Electronics · OPT - Optics · TS - Technical Sciences


This article presents work on a Silicon-On-Insulator (SOI) compact sensing platform based on Micro Ring Resonators (MRRs). In order to enable correction for variations in environmental conditions (temperature, mechanical stress etc), a study has been performed on the performance of uncoated sensing MRRs, and of SU8- and SiO2-covered reference MRRs. Excellent shielding for both cover materials has been obtained, however, water permeation into the SU8 causes a slow drift in sensor response. We believe that a user-friendly, low-cost and robust way for optical interfacing to MRR sensor chips is required for practical application in Point-Of-Care diagnostics, and that the cost and complexity of optical-electrical read-out systems must decrease. We have taken first steps to realize that vision, by building a prototype free-space optical coupling set-up, which enables non-photonic experts to characterize surface activation processes using MRRs. Moreover, we present our first steps towards on-chip read-out systems. © 2014 SPIE.