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Zinc acetylacetonate as MOCVD precursor for ZnO: the effect of hydration on the evaporation behavior

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Author: Theelen, M.J. · Kouijzer, S. · Timmer, K. · Winands, G.J.J. · Poodt, P.W.G.
Type:article
Date:2010
Institution: TNO Industrie en Techniek
Source:8th International Conference on Coatings on Glass and Plastics - Advanced Coatings for Large-Area or High-Volume Products, ICCG8, Braunschweig, Germany, June 13-17, 2010
Identifier: 464459
Keywords: Materials · zinc oxide · precursor · CVD · zincacetylacetonate · High Tech Systems & Materials · Industrial Innovation · Mechatronics, Mechanics & Materials · TFT - Thin Film Technology · TS - Technical Sciences