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Multi-agent MagLev

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Author: Kramer, L. · Dool, T.C. van den · Witvoet, G.
Type:article
Date:2019
Publisher: Dutch Society for Precision Engineering DSPE
Place: Eindhoven
Source:Mikroniek, 5, 59, 5-10
Identifier: 870073
Keywords: High Tech Systems & Materials · Industrial Innovation

Abstract

A nano-precision-capable, multi-agent, flexible positioning platform can be used to increase (metrology) throughput in semiconductor industry by parallelisation of measurements. It is based on magnetic levitation (MagLev) and 6-DoF control, combining large x- and y-motions with sub-nanometer scanning resolution in a single stage. The system architecture of this flexible positioning platform has the ability to operate many devices in parallel. Each device can function as a lab-on-instrument to perform various tasks at the nanoscale, e.g. metrology, inspection, deposition, transport, cleaning, etc. A demonstrator set-up was successfully designed, built and tested.