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Patterning of Flexible Organic Light Emitting Diode (FOLED) stack using an ultrafast laser

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Author: Mandamparambil, R. · Fledderus, H. · Steenberge, G.V. · Dietzel, A.H.
Institution: TNO Industrie en Techniek
Source:Optics Express, 8, 18, 7575-7583
Identifier: 461593
Keywords: Electronics · Ablation area · Chemical compositions · Femto-second laser · Flexible organic electronics · Flexible organic light - emitting diodes · Flexible substrate · Fs laser · Layer interfaces · Layer thickness · Multilayer stacks · Post-deposition · Ultrafast laser · Ablation · Helmet mounted displays · Light emission · Light emitting diodes · Organic lasers · Physical optics · Pulsed laser applications · Organic light emitting diodes (OLED) · Industrial Innovation · Mechatronics, Mechanics & Materials · HOL - Holst · TS - Technical Sciences


A femtosecond laser has been successfully utilized for patterning thin Flexible Organic Light Emitting Diode (FOLED) structures of individual layer thickness around 100nm. The authors report in this paper a step-like ablation behavior at the layer interfaces which accounts for a local removal of entire layers. Various surface analyzing techniques are used to investigate the morphologies and chemical compositions within and in the vicinity of the ablation areas. This study opens a new avenue in selectively ablating different layers from a multilayer stack on flexible substrates using fs lasers allowing post deposition structuring of large area flexible organic electronic devices. © 2010 Optical Society of America.