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In-situ localized carbon nanotube growth inside partially sealed enclosures

Author: Burgt, Y. van de · Champion, A. · Bellouard, Y.
Publisher: AIP Publishing
Source:AIP Advances, 9, 3, 092119-1 - 092119-6
Identifier: 482974
doi: doi:10.1063/1.4821952
Article number: 092119
Keywords: Chemistry · And filters · Carbon nanotube structures · Carbon nanotube growth · Gas diffusion · Laser-assisted chemical vapor depositions · Nanotube assemblies · Post process · Proof of concept · Chemical vapor deposition · Mechatronics, Mechanics & Materials · HOL - Holst · TS - Technical Sciences


Carbon nanotube assemblies can be used for specific applications such as sensors and filters. We present a method and proof-of-concept to directly grow vertically-aligned carbon nanotube structures within sealed enclosures by means of a feedback-controlled laser-assisted chemical vapor deposition technique. The process is compatible with a variety of micro-fabrication processes and bypasses the need for post-process packaging. Our experiments raise interesting observations related to the gas diffusion dynamics in micro-scale and sub-micron enclosures.